Room-Temperature Nanoimprint Lithography Using...

Japanese Journal of Applied Physics 2006 / 5 Vol. 45; Iss. 5A

Room-Temperature Nanoimprint Lithography Using Photosensitive Dry Film

Nakamatsu, Ken-ichiro, Tone, Katsuhiko, Matsui, Shinji
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Volume:
45
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.45.4290
Date:
May, 2006
File:
PDF, 721 KB
english, 2006
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