Design, Fabrication, and Characterization of Tunable Micromachined Filter with Double-Cavity Structure
Janto, Wiganes, Matsutani, Akihiro, Koyama, FumioVolume:
45
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.45.7732
Date:
October, 2006
File:
PDF, 859 KB
english, 2006