Formation of surface relief in plasma polymerized films
Melikhov, K G, Shterenberg, A M, Zyn, V IVolume:
39
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/39/5/008
Date:
March, 2006
File:
PDF, 437 KB
english, 2006