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Study of the effects of photoresist surface roughness and defects on developed profiles
Sirakoulis, G Ch, Karafyllidis, I, Mardiris, V, Thanailakis, AVolume:
15
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/15/2/303
Date:
February, 2000
File:
PDF, 542 KB
english, 2000