Study of the effects of photoresist surface roughness and...

Study of the effects of photoresist surface roughness and defects on developed profiles

Sirakoulis, G Ch, Karafyllidis, I, Mardiris, V, Thanailakis, A
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
15
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/15/2/303
Date:
February, 2000
File:
PDF, 542 KB
english, 2000
Conversion to is in progress
Conversion to is failed