Ultraviolet-nanoimprint of 40 nm scale patterns using...

Nanotechnology 2006 / 07 Vol. 17; Iss. 13

Ultraviolet-nanoimprint of 40 nm scale patterns using functionally modified fluorinated hybrid materials

Kim, Woo-Soo, Choi, Dae-Geun, Bae, Byeong-Soo
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Volume:
17
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/17/13/040
Date:
July, 2006
File:
PDF, 1.09 MB
english, 2006
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