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High resolution radially symmetric nanostructures from simultaneous electron beam induced etching and deposition
Lobo, Charlene J, Toth, Milos, Wagner, Raymond, Thiel, Bradley L, Lysaght, MichaelVolume:
19
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/19/02/025303
Date:
January, 2008
File:
PDF, 517 KB
english, 2008