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Design, realization and testing of micro-mechanical...

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Design, realization and testing of micro-mechanical resonators in thick-film silicon technology with postprocess electrode-to-resonator gap reduction

D. Galayko, A. Kaiser, L. Buchaillot, B. Legrand, D. Collard, C. Combi
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Year:
2003
Language:
english
DOI:
10.1088/0960-1317/13/1/319
File:
PDF, 273 KB
english, 2003
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