Design, realization and testing of micro-mechanical resonators in thick-film silicon technology with postprocess electrode-to-resonator gap reduction
D. Galayko, A. Kaiser, L. Buchaillot, B. Legrand, D. Collard, C. CombiYear:
2003
Language:
english
DOI:
10.1088/0960-1317/13/1/319
File:
PDF, 273 KB
english, 2003