Characterization of Cu surface cleaning by hydrogen plasma

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Characterization of Cu surface cleaning by hydrogen plasma

M. R. Baklanov, D. G. Shamiryan, Z. Tökei, G. P. Beyer, T. Conard, S. Vanhaelemeersch, K. Maex
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Year:
2001
Language:
english
DOI:
10.1116/1.1387084
File:
PDF, 973 KB
english, 2001
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