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Silicon laterally resonant microcantilevers for absolute pressure measurement with integrated actuation and readout
M. Cocuzza, I. Ferrante, A. Ricci, E. Giuri, L. Scaltrito, D. Bich, A. Merialdo, P. Schina, R. CorrealeYear:
2008
Language:
english
DOI:
10.1116/1.2870221
File:
PDF, 675 KB
english, 2008