Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2012 Vol. 30; Iss. 6
Density measurement of pillar structure fabricated via nanoimprinting using a poly(dimethylsiloxane) mold
Kang, Yuji, Nakai, Yasuki, Haruyama, Yuichi, Matsui, ShinjiVolume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4758776
File:
PDF, 1.53 MB
english, 2012