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Effects of Implantation Temperature on Lattice Location of Tellurium Implanted in Gallium Arsenide
Takai, Mikio, Gamo, Kenji, Masuda, Kohzoh, Namba, SusumuVolume:
12
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.12.1926
Date:
December, 1973
File:
PDF, 264 KB
english, 1973