Measurement of Hydrogen Atom Flux from ECR Plasma

Japanese Journal of Applied Physics 1981 / 9 Vol. 20; Iss. 9

Measurement of Hydrogen Atom Flux from ECR Plasma

Yano, Katsuki, Oyama, Hitoshi, Sakamoto, Yuichi, Okazaki, Kiyohiko, Ishibe, Yukio
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Volume:
20
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.20.1765
Date:
September, 1981
File:
PDF, 191 KB
english, 1981
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