Gas Mixing Effect on Ion Current Spectrum and Its...

Japanese Journal of Applied Physics 1982 / 4 Vol. 21; Iss. Part 1, No

Gas Mixing Effect on Ion Current Spectrum and Its Application to Optimize Implantation Source Gas Composition

Irita, Yukio, Kajiyama, Kenji
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Volume:
21
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.21.633
Date:
April, 1982
File:
PDF, 129 KB
english, 1982
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