Mass- and Electron-Spectroscopic Observation of Resist Decomposition by Synchrotron Radiation
Ichimura, Shingo, Hirata, Masahiro, Tanino, Hiroshi, Atoda, Nobufumi, Hoh, Koichiro, Ono, MasatoshiVolume:
22
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.22.L406
Date:
July, 1983
File:
PDF, 729 KB
english, 1983