Silicon Thin-Film Formation by Direct Photochemical...

Japanese Journal of Applied Physics 1983 / 1 Vol. 22; Iss. Part 2, No

Silicon Thin-Film Formation by Direct Photochemical Decomposition of Disilane

Mishima, Yasuyoshi, Hirose, Masataka, Osaka, Yukio, Nagamine, Kunihiro, Ashida, Yoshinori, Kitagawa, Nobuhisa, Isogaya, Kazuyoshi
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
22
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.22.L46
Date:
January, 1983
File:
PDF, 301 KB
english, 1983
Conversion to is in progress
Conversion to is failed