Development of Phosphorus Liquid-Metal-Ion Source

Japanese Journal of Applied Physics 1984 / 5 Vol. 23; Iss. Part 2, No

Development of Phosphorus Liquid-Metal-Ion Source

Ishitani, Tohru, Umemura, Kaoru, Tamura, Hifumi
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Volume:
23
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.23.L330
Date:
May, 1984
File:
PDF, 380 KB
1984
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