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Focusing Characteristics of X-Ray Zone Plates Fabricated by Electron Beam Lithography and Reactive Ion Etching
Aritome, Hiroaki, Aoki, Hitoshi, Namba, SusumuVolume:
23
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.23.L406
Date:
June, 1984
File:
PDF, 713 KB
1984