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Interrelation of Si Internal Stress and Si/SiO 2 Interface Stress
Iechi, Hiroyuki, Satoh, ShiroVolume:
23
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.23.L743
Date:
September, 1984
File:
PDF, 232 KB
english, 1984