Pressure Dependence of Carbon Film Coating by a Toroidal...

Japanese Journal of Applied Physics 1985 / 11 Vol. 24; Iss. Part 1, No

Pressure Dependence of Carbon Film Coating by a Toroidal Methane Discharge

Kojima, Hiroaki, Kako, Hidenori, Terada, Mamoru, Sugai, Hideo, Okuda, Takayoshi
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
24
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.24.1432
Date:
November, 1985
File:
PDF, 651 KB
english, 1985
Conversion to is in progress
Conversion to is failed