SIMS Study of Compositional Disordering in Si Ion Implanted...

Japanese Journal of Applied Physics 1986 / 5 Vol. 25; Iss. Part 2, No

SIMS Study of Compositional Disordering in Si Ion Implanted AlGaAs-GaAs Superlattice

Kobayashi, Junji, Nakajima, Masato, Bamba, Yasuo, Fukunaga, Toshiaki, Matsui, Kazunori, Ishida, Koji, Nakashima, Hisao, Ishida, Koichi
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Volume:
25
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.25.L385
Date:
May, 1986
File:
PDF, 2.89 MB
english, 1986
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