Low-Temperature Silicon Epitaxial Growth by Photochemical...

Japanese Journal of Applied Physics 1987 / 7 Vol. 26; Iss. Part 2, No

Low-Temperature Silicon Epitaxial Growth by Photochemical Vapor Deposition Using Vacuum Ultraviolet Light

Gonohe, Narishi, Shimizu, Saburo, Tamagawa, Kouichi, Hayashi, Toshio, Yamakawa, Hiroyuki
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
26
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.26.L1189
Date:
July, 1987
File:
PDF, 234 KB
english, 1987
Conversion to is in progress
Conversion to is failed