Dependence of Gettering Efficiency on Metal Impurities

Japanese Journal of Applied Physics 1989 / 4 Vol. 28; Iss. Part 2, No

Dependence of Gettering Efficiency on Metal Impurities

Miyazaki, Morimasa, Sano, Masakazu, Sadamitsu, Shinsuke, Sumita, Shigeo, Fujino, Nobukatsu, Shiraiwa, Toshio
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Volume:
28
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.28.L519
Date:
April, 1989
File:
PDF, 536 KB
english, 1989
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