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MOS-Type Micro-Oxygen Sensor Using LaF 3 Workable at Room Temperature
Katsube, Teruaki, Hara, Masashi, Serizawa, Izumi, Ishibashi, Norio, Adachi, Nobuo, Miura, Norio, Yamazoe, NoboruVolume:
29
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.29.L1392
Date:
August, 1990
File:
PDF, 675 KB
english, 1990