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Preparation of Thin Silicon-on-Insulator Films by Low-Energy Oxygen Ion Implantation
Ishikawa, Yukari, Shibata, NoriyoshiVolume:
30
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.30.2427
Date:
October, 1991
File:
PDF, 273 KB
english, 1991