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1 H Nuclear Magnetic Resonance Study of Hydrogenated Amorphous Silicon Deposited from a Xe-diluted Silane Plasma
Hayashi, Shigenobu, Hayamizu, Kikuko, Mashima, Satoshi, Suzuki, Atsushi, Mcelheny, Peter J., Yamasaki, Satoshi, Matsuda, AkihisaVolume:
31
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.31.989
Date:
April, 1992
File:
PDF, 248 KB
english, 1992