Enhanced Thermal Oxidation of Silicon in Steam Ambient by UV-Irradiation
Ishikawa, Yutaka, Shibamoto, Tsuyoshi, Nakamichi, IchiroVolume:
31
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.31.L750
Date:
June, 1992
File:
PDF, 629 KB
english, 1992