Ion-Beam-Assisted Deposition of TiN Thin Films

Japanese Journal of Applied Physics 1993 / 8 Vol. 32; Iss. Part 1, No

Ion-Beam-Assisted Deposition of TiN Thin Films

Kubota, Hiroshi, Chen, Jen Sue, Nagata, Masanori, Kolawa, Elzbieta, Nicolet, Marc Aurele
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Volume:
32
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.3414
Date:
August, 1993
File:
PDF, 744 KB
english, 1993
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