Adsorption and Desorption of AlCl 3...

Japanese Journal of Applied Physics 1993 / 12 Vol. 32; Iss. Part 1, No

Adsorption and Desorption of AlCl 3 on Si(111)7×7 Observed by Scanning Tunneling Microscopy and Atomic Force Microscopy

Uesugi, Katsuhiro, Takiguchi, Takaharu, Izawa, Michiyoshi, Yoshimura, Masamichi, Yao, Takafumi
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Volume:
32
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.6200
Date:
December, 1993
File:
PDF, 482 KB
english, 1993
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