Fabrication of a New Pyroelectric Infrared Sensor Using MgO...

Japanese Journal of Applied Physics 1993 / 12 Vol. 32; Iss. Part 1, No

Fabrication of a New Pyroelectric Infrared Sensor Using MgO Surface Micromachining

Kotani, Tokumi, Nakanishi, Tsutomu, Nomura, Koji
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Volume:
32
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.6297
Date:
December, 1993
File:
PDF, 1.62 MB
1993
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