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Carbon-Induced Rapid Annihilation of Thermal Double Donors in Czochralski Silicon Studied by Infrared Absorption Spectroscopy
Kamiura, Yoichi, Uno, Yutaka, Hashimoto, FumioVolume:
32
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.L1715
Date:
December, 1993
File:
PDF, 536 KB
english, 1993