Substrate Potential Effects on Low-Temperature Preparation...

Japanese Journal of Applied Physics 1993 / 12 Vol. 32; Iss. Part 2, No

Substrate Potential Effects on Low-Temperature Preparation of SrTiO 3 Thin Films by RF Magnetron Sputtering

Shibuya, Munehiro, Nishitsuji, Mitsuru, Kitagawa, Masatoshi, Kamada, Takeshi, Hayashi, Shigenori, Tamura, Akiyoshi, Hirao, Takashi
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Volume:
32
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.L1830
Date:
December, 1993
File:
PDF, 614 KB
1993
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