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Substrate Potential Effects on Low-Temperature Preparation of SrTiO 3 Thin Films by RF Magnetron Sputtering
Shibuya, Munehiro, Nishitsuji, Mitsuru, Kitagawa, Masatoshi, Kamada, Takeshi, Hayashi, Shigenori, Tamura, Akiyoshi, Hirao, TakashiVolume:
32
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.L1830
Date:
December, 1993
File:
PDF, 614 KB
1993