Electromigration Characteristics of Cu–Al Precipitate in...

Japanese Journal of Applied Physics 1994 / 7 Vol. 33; Iss. Part 1, No

Electromigration Characteristics of Cu–Al Precipitate in AlCu Interconnection

Shingubara, Shoso, Nishida, Hiroyuki, Sakaue, Hiroyuki, Horiike, Yasuhiro
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Volume:
33
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.33.3860
Date:
July, 1994
File:
PDF, 1.30 MB
1994
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