Density Measurement of O Atoms in Helicon Wave Oxygen...

Japanese Journal of Applied Physics 1994 / 7 Vol. 33; Iss. Part 1, No

Density Measurement of O Atoms in Helicon Wave Oxygen Discharge by Two-Photon Laser-Induced Fluorescence

Kadota, Kiyoshi, Konno, Yuji, Aoto, Koji, Shoji, Tatsuo, Sato, Teruyuki
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Volume:
33
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.33.4308
Date:
July, 1994
File:
PDF, 477 KB
english, 1994
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