X-Ray Chemical Analysis of Multilayered Thin Films by...

Japanese Journal of Applied Physics 1994 / 6 Vol. 33; Iss. Part 2, No

X-Ray Chemical Analysis of Multilayered Thin Films by Scanning Electron Microscopy and Total-Reflection-Angle X-Ray Spectroscopy

Yonemitsu, Kyoko, Shibata, Noriyoshi
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Volume:
33
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.33.L813
Date:
June, 1994
File:
PDF, 530 KB
english, 1994
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