Effects of the Aspect Ratio on Stress-Induced Open Failure...

Japanese Journal of Applied Physics 1994 / 1 Vol. 33; Iss. Part 2, No

Effects of the Aspect Ratio on Stress-Induced Open Failure in an Aluminum Line of LSI Interconnects

Hiraoka, Kazunori
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
33
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.33.L87
Date:
January, 1994
File:
PDF, 117 KB
english, 1994
Conversion to is in progress
Conversion to is failed