Influence of Optical Parameters of Synchrotron Radiation Lithography Beamline on Pattern Replication
Shimano, Hiroki, Ozaki, Yoshihiko, Marumoto, KenjiVolume:
35
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.35.1922
Date:
March, 1996
File:
PDF, 962 KB
1996