Influence of Optical Parameters of Synchrotron Radiation...

Influence of Optical Parameters of Synchrotron Radiation Lithography Beamline on Pattern Replication

Shimano, Hiroki, Ozaki, Yoshihiko, Marumoto, Kenji
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Volume:
35
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.35.1922
Date:
March, 1996
File:
PDF, 962 KB
1996
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