In Situ Mass and Photoemission Studies of Fluorinated...

Japanese Journal of Applied Physics 1996 / 4 Vol. 35; Iss. Part 2, No

In Situ Mass and Photoemission Studies of Fluorinated Polyimide Films Irradiated with an Electron Beam

Yamada-Maruo, Yasuko, Sasaki, Shigekuni, Tamamura, Toshiaki
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Volume:
35
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.35.L523
Date:
April, 1996
File:
PDF, 308 KB
english, 1996
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