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Carbon Nitride Films Produced Using Electron Cyclotron Resonance Nitrogen Plasmas
Zhang, Mei, Pan, Lujun, Miyazaki, Tsutomu, Nakayama, YoshikazuVolume:
36
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.36.4897
Date:
July, 1997
File:
PDF, 307 KB
english, 1997