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Fabrication of P b ( Z r , T i ) O 3 Microscopic Capacitors by Electron Beam Lithography
Hiratani, Masahiko, Okazaki, Choichiro, Hasegawa, Haruhiro, Sugii, Nobuyuki, Tarutani, Yoshinobu, Takagi, KazumasaVolume:
36
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.36.5219
Date:
August, 1997
File:
PDF, 220 KB
english, 1997