Plasma Component Filtering through a Hole Using the Sheath...

Japanese Journal of Applied Physics 1997 / 11 Vol. 36; Iss. Part 1, No

Plasma Component Filtering through a Hole Using the Sheath Generated around the Hole on Surface Modification by RF Plasma

Izumi, Yori, Ohte, Takeo, Kojima, Akira
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Volume:
36
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.36.7004
Date:
November, 1997
File:
PDF, 540 KB
english, 1997
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