Refractive Index Distribution in Photoresist Thin Film...

Refractive Index Distribution in Photoresist Thin Film Formed by the Spin Coating Method

Wakamiya, Wataru, Hirayama, Makoto, Yasuoka, Akihiko, Kawai, Akira
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Volume:
36
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.36.L1622
Date:
December, 1997
File:
PDF, 368 KB
1997
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