![](/img/cover-not-exists.png)
Refractive Index Distribution in Photoresist Thin Film Formed by the Spin Coating Method
Wakamiya, Wataru, Hirayama, Makoto, Yasuoka, Akihiko, Kawai, AkiraVolume:
36
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.36.L1622
Date:
December, 1997
File:
PDF, 368 KB
1997