Preparation of Position-Controlled Crystal-Silicon Island...

Japanese Journal of Applied Physics 1998 / 10 Vol. 37; Iss. Part 1, No

Preparation of Position-Controlled Crystal-Silicon Island Arrays by Means of Excimer-Laser Annealing

Oh, Chang-Ho, Matsumura, Masakiyo
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Volume:
37
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.37.5474
Date:
October, 1998
File:
PDF, 604 KB
english, 1998
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