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Sub-0.1 µm Patterning Characteristics of Inorganic Thin Films by Focused-Ion-Beam Lithography
Lee, Hyun-Yong, Paek, Seung-Woo, Chung, Hong-BayVolume:
37
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.37.6792
Date:
December, 1998
File:
PDF, 969 KB
1998