Dependence of Driving Frequency on Capacitively Coupled...

Japanese Journal of Applied Physics 1999 / 7 Vol. 38; Iss. Part 1, No

Dependence of Driving Frequency on Capacitively Coupled Plasma in CF 4

Segawa, Sumie, Kurihara, Masaru, Nakano, Nobuhiko, Makabe, Toshiaki
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Volume:
38
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.38.4416
Date:
July, 1999
File:
PDF, 415 KB
english, 1999
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