Effects of Crossed Magnetic Fields on Silicon Particles in...

Japanese Journal of Applied Physics 1999 / 7 Vol. 38; Iss. Part 1, No

Effects of Crossed Magnetic Fields on Silicon Particles in Plasma Chemical Vapor Deposition Process

Fujiyama, Hiroshi, Maemura, Yoko, Ohtsu, Mikio
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Volume:
38
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.38.4550
Date:
July, 1999
File:
PDF, 1.48 MB
english, 1999
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