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Comparison of Microstructure and Crystal Structure of Polycrystalline Silicon Exhibiting Varied Textures Fabricated by Microwave and Very High Frequency Plasma Enhanced Chemical Vapor Deposition and Their Transport Properties
Kamiya, Toshio, Nakahata, Kouichi, Ro, Kazuyoshi, Fortmann, Charles M., Shimizu, IsamuVolume:
38
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.38.5750
Date:
October, 1999
File:
PDF, 160 KB
english, 1999