Preparation of SrBi 2 Ta 2 O 9 Thin Films by Liquid-Delivery Metalorganic Chemical Vapor Deposition using a Double Alcoholate Source
Jimbo, Takehito, Sano, Haruyuki, Takahashi, Yuji, Funakubo, Hiroshi, Tokumitsu, Eisuke, Ishiwara, HiroshiVolume:
38
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.38.6456
Date:
November, 1999
File:
PDF, 348 KB
english, 1999