Low Temperature Recovery of Ru/(Ba, Sr)TiO 3 /Ru Capacitors Degraded by Forming Gas Annealing
Iizuka, Toshihiro, Arita, Koji, Yamamoto, Ichiro, Yamamichi, Shintaro, Yamaguchi, Hiromu, Matsuki, Takeo, Sone, Shuji, Yabuta, Hisato, Miyasaka, Yoichi, Kato, YoshitakeVolume:
39
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.39.2063
Date:
April, 2000
File:
PDF, 191 KB
english, 2000