Novel Barrier Dielectric Liner Prepared by Liquid-Phase...

Japanese Journal of Applied Physics 2000 / 12 Vol. 39; Iss. Part 1, No

Novel Barrier Dielectric Liner Prepared by Liquid-Phase Deposition and NH 3 -Plasma Annealing

Yeh, Ching-Fa, Lee, Yueh-Chuan, Chen, Chi-Ming, Wu, Kwo-Hau
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Volume:
39
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.39.6672
Date:
December, 2000
File:
PDF, 602 KB
english, 2000
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