Titanium Nitride Membrane Application to Extended Gate...

Japanese Journal of Applied Physics 2001 / 11 Vol. 40; Iss. Part 1, No

Titanium Nitride Membrane Application to Extended Gate Field Effect Transistor pH Sensor Using VLSI Technology

Chin, Yuan-Lung, Chou, Jung-Chuan, Lei, Zhen-Ce, Sun, Tai-Ping, Chung, Wen-Yaw, Hsiung, Shen-Kan
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Volume:
40
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.40.6311
Date:
November, 2001
File:
PDF, 228 KB
english, 2001
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